Fabrication of low-loss SOI nano-waveguides including BEOL processes for nonlinear applications
نویسندگان
چکیده
منابع مشابه
Fabrication and characterization of As2S3/Y3Fe5O12 and Y3Fe5O12/SOI strip-loaded waveguides for integrated optical isolator applications
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ژورنال
عنوان ژورنال: Journal of the European Optical Society: Rapid Publications
سال: 2012
ISSN: 1990-2573
DOI: 10.2971/jeos.2012.12032